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Silicon Anodization as a Structuring Technique

Literature Review, Modeling and Experiments

By (author) Alexey Ivanov
Format: Paperback / softback
Publisher: Springer Fachmedien Wiesbaden, Weisbaden, Germany
Imprint: Springer Vieweg
Published: 22nd Sep 2017
Dimensions: w 148mm h 210mm d 18mm
Weight: 417g
ISBN-10: 3658192372
ISBN-13: 9783658192372
Barcode No: 9783658192372
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Synopsis
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

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