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2001 IEEE International Symposium on Semiconductor Manufacturing

Format: Paperback
Publisher: I.E.E.E.Press, Piscataway NJ, United States
Published: 30th Oct 2001
ISBN-10: 0780367316
ISBN-13: 9780780367319
Barcode No: 9780780367319
Topics covered in this volume include: factory design; manufacturing strategy and management; manufacturing control and execution; yield enhancement methodology; ultraclean technology; environment, safety and health; process and metrology equipment; and process and material optimization.

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