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5th International Symposium on Plasma Process-Induced Damage, 2000

By (author) Oy O Butsuri Gakkai
Format: Paperback
Publisher: I.E.E.E.Press, Piscataway NJ, United States
Published: 31st Jan 2001
ISBN-10: 0965157741
ISBN-13: 9780965157742
Barcode No: 9780965157742
This text covers topics such as: CVD process damage effects; electron shading mechanism; front-end process damage effects; damage in multilevel interconnects; damage effects characterization; 300mm technology; thin dielectrics and degradation mechanisms and antenna test structures and design.

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