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Laser Based Interferometric Remote Measuring Technique for the Determination of Film Thicknesses and Film Properties

Reports on Measurement & Sensor Systems

By (author) Qilong Feng
Format: Paperback
Publisher: Shaker Verlag GmbH, Germany, Aachen, Germany
Published: 17th Jul 2001
Dimensions: w 148mm h 210mm
ISBN-10: 3826590554
ISBN-13: 9783826590559
Barcode No: 9783826590559
ISSN: 1617-6553

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