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Process Engineering Analysis in Semiconductor Device Fabrication

Format: Hardback
Publisher: McGraw-Hill Education - Europe, New York, United States
Imprint: McGraw-Hill Inc.,US
Published: 1st Jan 1993
Dimensions: w 170mm h 230mm d 38mm
Weight: 1230g
ISBN-10: 0070418535
ISBN-13: 9780070418530
Barcode No: 9780070418530
Written primarily for chemical engineering students, the material included in this new text is an extension of upper level chemical engineering courses. Covering a range of processes in semiconductor device fabrication, the authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers such topics as crystal growth and filtration and contains over 300 worked examples and problems.

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